Intel uses ASML High NA EUV for production
Analysis based on 7 articles · First reported Jul 15, 2026 · Last updated Jul 15, 2026
ASML N.V. announced that Intel Foundry has entered high-volume manufacturing for a subset of Intel Core Ultra Series 3 processors (code-named Panther Lake) using ASML's High NA EUV lithography technology on the Intel 18A process node. Specific Intel 18A layers are dual-qualified on High NA EUV in United States — Oregon, with product shipping to customers at yields matched to the NXE platform. This milestone demonstrates High NA EUV readiness in a production environment, paving the way for broader adoption. Intel and ASML continue to collaborate on High NA EUV readiness with flexibility to incorporate into future nodes. Intel Foundry is the first to ship high-volume logic product using High NA EUV.
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